High Vacuum Metal Oil Diffusion Pump for PVD Coating Machines

• Customization: Available
• After-sales Service: 12 Months After Use
• Warranty: 12 Months After Use
• Model NO.: oil diffusion pump
• Oil or Not: Oil Free
• Structure: Rotary Vacuum Pump
• Exhauster Method: Entrapment Vacuum Pump
• Vacuum Degree: High Vacuum
• Work Function: Fore Pump
• Working Conditions: Dry
• Entrance Diameter: 100mm-500mm
• Pumping Speed: 300L×s-1- 11000L×s-1
• Extreme Pressure: 5×10-5PA
• Max. Exh. Pre.: 40PA
• Injection Oil: 0.11L-22.5L
• Heating Power: 0.65kw-26.4kw
• Cooling Water Flow: 100L×h-1-1600L×h-1
• Recommende Dpre Pumping Speed: 4L× S-1-300L× S-1
• Input V.: 200V/380V
• Transport Package: Export Packing
• Specification: As details
• Trademark: Haipurui
• Origin: China
• Production Capacity: 8000 Sets/Year
• Package Size: 50.00cm * 25.00cm * 25.00cm
• Package Gross Weight: 50.000kg

Product Description

High vacuum metal oil diffusion pump

Product Description

             High vacuum metal oil diffusion pump (hereinafter referred to as the diffusion pump) is used in electronic industry, chemical industry, vacuum metallurgy, atomic energy industry and other fields, in order to take out the air by pumping the container, so as to achieve the purpose of high vacuum (up to 10-5Pa).

             Diffusion pumps for pumping gas without serious damage to pump oil in high vacuum system.

 

Composition and represents the meaning of type

1.Diffusion pump is composed of K type and KT type.

2.The pump casing of K diffusion pump is straight cavity while the pump casing of KT diffusion pump is convex cavity
3.K(diffusion pump) -100(inlet diameter)
4.K(diffusion pump) T(convex cavity)-200(inlet diameter)
 

Recommended the use of the environment

environment: temperature	10~35ºC
moisture	≤85%
supply voltage	380v ±5%
cooling water pressure water pressure	0.2~0.4Mpa
cooling water quality	industrial water
inlet water temperature	4 ~20ºC

Product structure

The work principle

1.Diffusion pump oil in vacuum (< 10Pa) is heated to boiling temperature, produce large amounts of oil vapor, the vapor passes through the guide tube directed by various high speed from the nozzle.

2.Because the pressure of diffusion pump nearby inlet is higher than that of the vapor stream, so the pumped gas molecules will continue to spread to the steam flow. Oil vapor impact pumped gas molecules, the pumped gas molecules along the vapor flow direction high speed movement. The molecules of a gas meet wall of the pump and back again, by the collision of steam flow and steam flow direction flow along the wall of the pump.

3.

After several times after the collision, the molecules of a gas is compressed to a low vacuum side, again by a few class of steam spray compression, and finally by the backing pump away. While the oil vapor in the wall of the pump cooling is condensed and returned to the pan to be heated, then the cycle to work.

 

 

Structural features

1.Diffusion pump is mainly made by the pump shell; pump core, evaporation boiler heater and cooling water pipe. KT pump is a type of oil pump which the convex cavity made between between the first nozzle and the second nozzle, in order to increase the pumping rate.

2.Pumpshellismainlyusedforputpumpcore,isolatingatmosphereandcondensingoil vapor. The inner surface after polishing. Pump core is composed of multi nozzle and a steam conduit, and is fixed in the pump shell.
 

Product Parameters

Technical parameters and connecting flange size

main parameters

Types	entrance diameter (mm)	pumping speed (L×S-1)	extreme pressure (Pa)	max.Exh. Pre.  (Pa)	injection  oil(L)	heating power (KW)	cooling water flow (L×h-1)	recommended prepumping speed(L× S-1)	input v. (V)
K-100	100	300	5×10-5	40	0.11	0.65	100	4	220
K-100B	100	300	5×10-5	40	0.11	0.65	100	4	220
K-150	150	800	5×10-5	40	0.3	1	150	8	220
K-200	200	1500	5×10-5	40	0.5	1.5	250	15	220
K-300	300	3300	5×10-5	40	1.3	2.1	300	30	220
K-400	400	5300	5×10-5	40	2.5	4.8	600	70	380
K-630	630	13000	5×10-5	40	6	8.4	850	150	380
K-630A	630	14000	5×10-5	40	8	14.4	850	150	380
K-800	800	25000	5×10-5	40	15	19.8	1200	240	380
K-1000	1000	40000	5×10-5	40	22.5	26.4	1600	300	380
TK-150	150	1000	5×10-5	40	0.3	1	150	8	220
TK-300	300	4000	5×10-5	40	1.3	2.4	300	30	220
KT-200	200	2000	5×10-5	40	0.55	1.8	250	15	220
KT-400	400	7000	5×10-5	40	3.5	4.8	600	70	380
KT-   500C	500	11000	5×10-5	40	5	6	700	70	380

Remarks
1.K-630A, K-800 and K-1000 by heating rod, the working voltage of each heating rod is 220 V.
2.K-100 and K-100B by heating plate heating,
3.The rest types using electric heating;

External and connecting dimensions

External and connecting dimensions from Fig. 2 and given in the table below

 connecting flange size 

type	D	d	D1	d1	H	A	L	n-M	n1-M1
K-100	170	145	78	64	315	130	125	4-M10	4-M6
K100B	170	145	78	64	315	130	125	4-M10	4-M6
K-150	220	195	110	90	470	180	165	8-M10	4-M8
K-200	275	250	125	105	515	240	200	8-M10	4-M8
K-300	380	350	145	125	690	330	280	8-M12	4-M8
K-400	500	465	170	145	840	440	360	8-M16	4-M10
K-630	750	720	225	200	1110	520	500	20-M12	8-M10

K-630A	750	720	165	145	1260	510	500	20-M12	8-M8
K-800	920	890	225	200	1560	600	965	24-M12	8-M10
K-1000	1120	1090	225	200	2000	815	1275	32-M12	8-M10
TK150	220	195	110	90	470	180	165	8-M10	4-M8
TK300	380	350	145	125	720	330	280	8-M12	4-M8
KT-200	275	250	125	105	550	240	200	8-M10	4-M8
KT-400	510	480	165	145	900	440	360	16-M12	8-M8
KT-500C	610	580	200	175	1110	500	500	16-M12	8-M10

 

The heater wiring diagram

check

Open the packing box to confirm the following contents
Is it the prescribed order model?
Whether there is damage during transport process
According to the packing list and inspection certificate, seals  and other accessories are included
If there is the appearance of the product damage or parts missing, please contact us

installation preparation

First of all, remove the cover on the part of air inlet and outlet
Make sure pump core, cold cap, pump body is damaged or not

We have tested the diffusion pump after delivery. If it is found that the diffusion pump due to insufficient oil or no oil, please join in the equipment of oil as requirement

Warm reminder: If the store time of diffusion pump  is more than  12 month, please  check the sealing ring, pump parts and pump oil. Recommend replacing sealing ring and pump oil.

Note: Heating the pump in the absence of pump oil may cause damage to the pump itself.

Please check the heater carefully. The heater wire, electrode can not contact with the shell so as to avoid short circuit or leakage.

Connect the circuit (reference to heater wiring diagram) and electric test.
Warning: Heating after grounding protection

Please use alcohol and other volatile solvent to  clean the flange  and  sealing ring and other parts, then dry surface treatment.
Use uniform amount of vacuum grease coating on the sealing ring surface.
 

installation

pipe connection
When installing flange, pay attention to ensure that the two flanges in parallel, that the sealing ring is not off.


Cooling water connection
The diffusion pump must be cooled by cooling water-Cooling water inlet, outletshall ensure that top in and bottom out, and reverse connection will affect the pump performance
Pump shell segment access cooling water, water  cooling path of each section should provide independent.    Tandem water will    affect    the pump     cooling    effect which    affects     the pump performance
Please provide independent water channel to  water retaining cap,  insufficient  cooling water will cause increased rates of return oil.


Electrical wiring
Please follow the prescribed voltage access to power, and in the formal electrifying before confirming whether the voltage is the voltage we specified value again.


Leak detection

After the installation is complete,before the pump heating, please do vacuum leakdetection to the whole system.
In proper conditions, please use helium mass spectrometer leak detector to the whole system.

Operation


Boot
Connected to the cooling water, to confirm whether the flow of cooling water requirements.
Before  start the  pump, when  the  diffusion pump outlet  pressure below   10Pa, can start  the heating power of the diffusion pump.
After pump heating 40 ~ 80 minutes, can enter the normal working state.


Stop
Turn off the high vacuum valve  first, and  then  cut  off the power supply of the diffusion pump, the backing pump continue to work.
when the temperature inside the pump body to ≤ 60 ºC(may touch by hand), can stop the backing vacuum pump.

Close cooling water.


The matters needing attention
To vent the pump, must be in the pump oil  temperature ≤ 60  ºC.
The  oil  temperature is too high will cause the pump oil oxidation,
resulting in pump performance drop.

Please release gas from the high vacuum side, to avoid damage to the pump core.
If not from high vacuum to end deflation, please ensure that the small flow slowly deflated.

When  the  accident  of power  cut  and  stops  of  the  water  supply, please according  to the following steps:

Cut off the power supply
Immediately close the high vacuum valve and the backing vacuum pump valve

Unloaded and move away the furnace heater (Caution! burn!!!)

Pouring water to the bottom of the pump (with water tank in top). Note: hot water vapor burn!

When stop use the pump in short term,

please drain the water away and use of compressed air to blow the residual moisture inside to prevent water pipeline corrosion.

The pump work after  a  period  of time, if it  is  found  that  the degree  of vacuum pumping speed reducing, or restore the system vacuum time is too long,  it need to pump cleaning and replacement of oil pump.

The diffusion pump should be stored at a temperature of 10 ºC ~ 35  ºC, relative humidity of not more than 85%ventilated room.
 

Analysis and troubleshooting of common failures
Common failure and troubleshooting of the diffusion pump

Fault		Elimination	Method
Diffusion pump not work		s  ystem   leakage, exceed   the allowable leakage rate	Leak detection and find out
		Heater doesn't work	Check whether the heater is broken
		Oil  heating shortage, low  oil temperature	Check the power supply voltage, the resistance heater  wire,    or the distance between the bottom  of the pot  and wire pot.
		Level pressure before check	Check  the  leak  of  backing  pump  or  the configuration of backing pump
		Nozzle loose	Fastening
Pumping    rate too low		Oil temperature too low	Checking the power supply and the heater, if the heater is burnt, please remove and replace
		Oil too little	Replace new oil
		Pump   core is   not   installed correctly	Check the pump core has not loosening,  or deflection,and the nozzle clearance is correct, and re-adjusts.
Ultimate pressure is  not  up to the requirements		vacuum system leakage	leak detection, find the leak and eliminate
		Vacuum  system  or pump  is not clean	Wash and keep clean

	Oil oxidation or cracking	Replace new oil
	Diffusion pump cooling bad	Check water temperature and the water flow
	Oil quantity is too much or too little	Increase or decrease the oil

                                           

Warning

After the heater in electricity, please don't touch to prevent electric shock.

For maintenance or check, please cut off the power supply.

Note
1.For the device, please use the specified voltage.
2.The device in runtime does not touch or near flammable objects, avoid causing a fire.
3.Equipment in operation process , such as the occurrence of abnormal sound ,
overheating and so on, please immediately stop the equipment.
4.The pump inside is not exposed to air during device operation.

5.Must be regularly checking the equipment.
6.Please operate the equipment have had experience in the use of personnel under the guidance.

Commitment
Our company's products have been strictly tested before delivery.
If a failure occurs in use or in the transportation process or equipment damage, please contact us.

Since the date of the purchasing,
our company will provide you the purchase equipment for one year the "Three Guarantees" service.

Any of the following circumstances, will not be within "Three Guarantees":

1.Unauthorized equipment renovation
2.Improper use or storage
3.Damaged · belonging to the user other causes
4.For damage caused by irresistible factors


Disclaimer
1.When the user is strictly in accordance with the provisions of the installation and use,
our company's equipment is safe, convenient and effective.
2.Because the user has not read  the instructions carefully,
or not in accordance with the requirements of the specification and cause any harm or loss,
our company will not bear any responsibility.
3.The specification is just for referring only. If in case of revision we will no notice in prefer.
If there is difference between the  product  and  the  instructions, we have the right of final interpretation.

Company Profile

industry case

FAQ

FAQ

Q:How can I pay for my items? What is the payment you can provide?
A:Common payment terms:T/T,30% deposit,balance payment before shipment.
TT or L/C at sight.
Q:How to customize pumps and mechanical seals ?
A:Customers could send us application data, we will select suitable pump and seal types, or client could send us drawings.
Q: Are you trading company or manufacturer?
A: We are professional Vacuum pump manufacturer and export pumps by ourselves. Our factory is located in Liaoning.
Q:How long is warranty?
A:1 year for main construction warranty.
Q:How about product quality and service assurance?
We are committed to providing high-quality products and services to our customers. To ensure that our products meet the highest standards, we conduct rigorous quality control tests and inspections throughout the production process. Additionally, we have a customer service team that is available to assist with any questions or concerns that customers may have, and we offer a satisfaction guarantee on all of our products.